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Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.
You can choose from various special specifications according to your application. Specifications for reaction byproduct measures, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.
Ultra-high vacuum specification turbo molecular pump
Ultra-high vacuum magnetic bearing composite molecular pump (high compression type) TG-MU series
A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!
It is ideal for high-performance electron microscopes, fine drawing devices, and analytical instruments.
Turbo molecular pump developed for use in radiation environments!
Increased durability against radiation, enabling operation in harsh environments. Delivered to facilities such as the Japan Proton Accelerator Research Complex (J-PARC)!
Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.
You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.
Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.
You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.
Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.
You can choose from various special specifications according to your application: reaction product countermeasure specification, ultra-low vibration specification, ultra-high vacuum specification, radiation-resistant specification, and high-temperature resistant specification.
High flow rate turbo molecular pump compatible with exhaust and low vibration.
We also have the reaction product countermeasure specifications TG2400MI in our lineup.
Significantly reduced the deposition of reaction products generated in the process onto the pump through unique generation product countermeasures!
In addition to heating with an external heater, effectively utilize the friction heat generated by the suction gas inside the pump to efficiently raise the temperature of the gas contact area. ■ The output of the external heater can be reduced, improving energy-saving effects!! ■ Minimize thermal impact on key components, reducing damage to the pump.
